The GEN930 system gives you maximum flexibility in materials research. Its geometry, unique cryopanel, and numerous ports for integrating today’s leading edge in situ analytical tools ensure material purity. The reliability of the system has been proven in many of the leading material research laboratories around the world.
The main components of the GEN930 system are:
- UHV Growth Chamber
- Buffer Chamber
- Load Lock Chamber
- Pumping System(s)
- GEN II Wafer Transport System
- Source Flange
- Substrate Manipulator
- Effusion Cells/Shutters
- Electronics
- Software
