MEMS Arch Resonator for Dynamic Mechanical Memory Using Electrothermal Frequency Modulation

Bibliography:

 M. A. Hafiz, L. Kosuru, H. Fariborzi, M. Younis, “MEMS Arch Resonator for Dynamic Mechanical Memory Using Electrothermal Frequency Modulation,” Asia-Pacific Conference of Transducers and Micro-Nano Technology, 2016.

Authors:

M. A. Hafiz, L. Kosuru, H. Fariborzi, M. Younis.

Keywords:

MEMS

Year:

2016