PH.D. DEFENSE
Sunday, October 13, 2024, at 04:30 p.m.
Auditorium, Between Building 2 and Building 3, Level 0
"MEMS Inertial Switches and Microgrippers for Biomedical Applications"
Committee Members
Prof. Eric Feron, Prof. Mohammad I Younis, Prof. Kamal Youcef-Toumi, Prof. Nazek El-Atab, Prof. Tadd Truscott
Abstract
This dissertation presents the optimized designs and fabrication processes for MEMS inertial switches and microgrippers for biomedical applications. First, three types of MEMS inertial switches — bi-directional, quad-directional, and omni-directional — are developed to enhance the sensitivity for detecting concussive brain impacts. These designs ensure uniform, reliable sensitivity across all sensing directions for low-ɡ applications. Next, two MEMS microgrippers are introduced. The first uses an electrostatic actuator and a compliant mechanical amplifier with a capacitive sensor to provide precise, safe manipulation of sensitive micro-objects. The second utilizes an electrothermal actuator and a compliant mechanical amplifier designed to minimize heat, ensuring safe handling of sensitive micro-objects while achieving high displacement. Finally, two MEMS fabrication processes optimized at the KAUST Nanofabrication Core Lab(NCL) are introduced. These processes enable in-house fabrication, demonstrating the versatility and capability of fabricating various MEMS devices with precision and reliability.
Bio
Yousef Algoos is currently a Ph.D. candidate in the Mechanical Engineering Program under the supervision of Prof. Eric Feron and Prof. Mohammad I Younis. He received his BS/MS degrees in Mechanical Engineering from University of Alabama, USA in 2019. He started his PhD studies at KAUST in 2020, and his research interest is focused on the Nano/Micro Electro-Mechanical Systems (N/MEMS) and Nanofabrication of semiconductors, specializing in the design and fabrication of N/MEMS devices. He conducts in-depth research on the linear and nonlinear dynamics of these devices, thoroughly analyzing their vibrational behaviors to optimize performance and applications.
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