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ICDS
Ultra miniaturized InterDigitated electrodes platform for sensing applications
1 min read ·
Sun, Mar 15 2020
News
Comsol Multiphysics
Circuits
IDEs
ICDS
Z. Wang, et al., "Ultra miniaturized InterDigitated electrodes platform for sensing applications." Microelectronic Engineering 225, 2020, 111253. InterDigitated Electrodes (IDEs) is a generic platform for a wide range of diverse applications with their implementation in sensing modules being a major one. We propose the use of IDCs with deep sub-micron critical dimension; equally spaced electrodes of 200 nm width for enhanced sensing performance and also the method of fabrication thereof. The transducer configuration was studied theoretically with a finite element method simulation by using
